Tantalum(V) ethoxide乙醇钽(V)

规格: 99%(99.999%-Ta)
CAS: 6074-84-6
产品编号: H95353
MDL: MFCD00049785
品牌: INFI

ALD简介

原子层沉积技术 (Atomic Layer Deposition,简称ALD)是一种在 纳米尺度上进行薄膜 沉积的先进技术。通过将物质以单原子形式一层一层的镀在基底表面,拥有优异的三维共形性、大面积成膜的均匀性和精确控制膜厚等特点。

ALD应用

ALD在能源领域应用

2009年,Miyaska课题组将钙钛矿材料MAPbI3用作燃料敏化太阳能电池的光伏活性层,正式开启了钙钛矿太阳能电池的新纪元。ALD凭借其均匀成膜性、精准控制厚度和保形性等多种优势,在光伏领域中发挥着重要作用。除此之外,ALD技术还可用于锂电池薄膜涂层,提高电池性能

ALD在泛半导体应用

随着泛半导体行业的发展,对微型化和集成化要求越来越高,尺寸缩小至亚微米和纳米量级, ALD作为一种高精度薄膜沉积技术,可用于晶体管栅极电介质层(高K材料)、金属栅电极、有机发光显示器涂层、铜互联扩散阻挡层、DRAM电介质层、微流体和MEMS涂层、传感器等众多领域。

ALD在光学领域应用

由于 ALD 具有的三维共形沉积和大面积均匀性特点,已成功应用于高质量光学薄膜、增透膜、折射率可调的光学薄膜、波状多层膜,改善了光子晶体的光学性质和可控性,增加了光子晶体在未来光学器件中的应用潜力。

公司致力于ALD高纯半导体薄膜前驱体材料的自主研发和生产,成立以来,已陆续向多家半导体客户提供了百余种前驱体新材料,包括高纯硅基前驱体系列、High-k前驱体系列产品,部分新品已被客户用于5nm以下制程薄膜设备。开云致力为客户提供优质的产品并建立互信、长久的合作关系,产品具有自主知识产权且原材料国产化,打破国外垄断的同时保证供应链的安全。开云科技愿与国内芯片、高端显示、光伏新能源等高端客户一起携手,解决高端半导体材料的把脖子难题,早日实现进口替代。




Chemical Name Tantalum(V) ethoxide
PubChem Substance ID 160806
EC Number 228-010-2
Beilstein Registry Number 3678999
Synonym Tantalum(V) Ethoxide (Metals Basis), Nb{LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis), Nb{} {} {} {} {} {} {} {} {} {} {} {} {}{} {} {} {} {} {} {} {} {} {} {} {} {} {LY} Tantalum(V) Ethoxide (Metals Basis),
Chemical Name Translation 乙醇钽(V)
InChIKey HSXKFDGTKKAEHL-UHFFFAOYSA-N
MDL Number MFCD00049785
CAS Number 6074-84-6
InChI InChI=1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5
Canonical SMILES [C2H6O.1/5Ta]
GHS Symbol
WGK Germany 1
Hazard statements
  • H226 Flammable liquid and vapour 易燃液体和蒸气
  • H314 Causes severe skin burns and eye damage 导致严重的皮肤灼伤和眼睛损伤
  • H319 Causes serious eye irritation 严重刺激眼睛
  • H335 May cause respiratory irritation 可能导致呼吸道刺激
    Personal Protective Equipment Faceshields, full-face respirator (US), Gloves, Goggles, multi-purpose combination respirator cartridge (US), type ABEK (EN14387) respirator filter
    Hazard Codes CC,FC;F
    Precautionary statements
    • P210 Keep away from heat/sparks/open flames/hot surfaces. — No smoking. 远离热源/火花/明火/热的表面。——禁止吸烟。
    • P233 Keep container tightly closed. ?保持容器密闭。
    • P240 Ground/bond container and receiving equipment. 与地面接触/连接集装箱和接受设备。
    • P241 Use explosion-proof electrical/ventilating/lighting/…/equipment. 使用防爆电气/通风/照明/ .../设备。
    • P242 Use only non-sparking tools. 只能使用无火花工具。
    • P243 Take precautionary measures against static discharge. 采取预防措施,防止静电放电。
    • P260 Do not breathe dust/fume/gas/mist/vapours/spray. 不要吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
    • P261 Avoid breathing dust/fume/gas/mist/vapours/spray. 避免吸入粉尘/烟/气体/烟雾/蒸汽/喷雾。
    • P264 Wash hands thoroughly after handling. 处理后要彻底洗净双手。
    • P271 Use only outdoors or in a well-ventilated area.? 只能在室外或通风良好的地方使用。
    • P280 Wear protective gloves/protective clothing/eye protection/face protection. 戴防护手套/防护服/眼睛的保护物/面部保护物。
    • P301+P330+P331
    • P303+P361+P353
    • P304+P340
    • P305+P351+P338
    • P310 Immediately call a POISON CENTER or doctor/physician. 立即呼救解毒中心或医生/医师。
    • P312 Call a POISON CENTER or doctor/physician if you feel unwell. 如果你感觉不适,呼叫解毒中心或医生/医师。
    • P321 Specific treatment (see … on this label). 具体治疗(见本标签上的)。
    • P337+P313
    • P363 Wash contaminated clothing before reuse. 被污染的衣服洗净后方可重新使用。
    • P370+P378
    • P403+P233
    • P403+P235
    • P405 Store locked up. 上锁保管。
    • P501 Dispose of contents/container to..… 处理内容物/容器.....
      Signal word Danger
      UN Number 2920UN2924UN 2920 8/PG 2
      Risk Statements
      • R10 Flammable 易燃
      • R34 Causes burns 会导致灼伤
        Safety Statements
        • S26 In case of contact with eyes, rinse immediately with plenty of water and seek medical advice 眼睛接触后,立即用大量水冲洗并征求医生意见;
        • S36/37/39 Wear suitable protective clothing, gloves and eye/face protection 穿戴适当的防护服、手套和眼睛/面保护;
        • S45 In case of accident or if you feel unwell seek medical advice immediately (show the label where possible) 发生事故时或感觉不适时,立即求医(可能时出示标签);
        • S16 Keep away from sources of ignition - No smoking 远离火源,禁止吸烟;
        • S20 When using do not eat or drink 使用时,不得进食,饮水;
        • S23 Do not breathe gas/fumes/vapour/spray (appropriate wording to be specified by the manufacturer) 不要吸入气体/烟雾/蒸汽/喷雾;
        • S60 This material and its container must be disposed of as hazardous waste 该物质及其容器必须作为危险废物处置;
          Storage condition Store at room temperature, keep dry and cool{LY} Store at room temperature, keep dry and cool{} {LY} Store at room temperature, keep dry and cool{} {} {LY} Store at room temperature, keep dry and cool{} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {} {} {} {} {} {LY} Store at room temperature, keep dry and cool{} {} {} {} {} {} {} {} {} {} {} {} {} {LY} Store
          Packing Group III
          Hazard Class 3
          Restrict 危险品
        • {SA}
        • Ritala, M.; et al. Science 288 , 319, (2000) 摘要
        • {SA}
        • {SA} Zhang, J-Y.; et al. Appl. Phys. Lett. 73 , 2299, (1998)
        • {SA}
        • Salm,; L. D.; et al. Chem. Vap. Deposition 15 , 221, (2009)
        • {SA}
        • Beil. 1 ,IV,1312
        • {SA}
        • FT-IR 2 (3), 4489:D / FT-NMR 1 (3), 744:A / RegBook 1 (2), 3055:I / Structure Index 1 , 484:D:4
        • {uni_hamburg} Short: IV/20B
        • Title: Vapor Pressure and Antoine Coefficients for Oxygen Containing Organic Compounds
        • Author: Dykyj, J.; Svoboda, J.; Wilhoit, R.C.; Frenkel, M.; Hall, K.R.
        • Editor: Hall, K.R.
        • Source: Landolt-Börnstein, New Series
        • Volume: IV/20B
        • Year: 2000
        • Keyword: organic compounds; vapor pressure
        • ISBN: 3-540-64968-9
        • ISBN: 978-3-540-64968-7
        • Internet Resource: DOI:10.1007/b71424
        • RefComment: VII, 320 pages.
        • {uni_hamburg} Short: EINECS
        • Title: EINECS (European Inventory of Existing Commercial Chemical Substances)
        • Source: Official Journal of the European Communities
        • Volume: C 146 A (15.06.1990)
        • Page: 1
        • Year: 1990
        • Internet Resource: http://ecb.jrc.ec.europa.eu/esis/index.php?PGM=ein
        • Publish_Date: 1990/06/15
        • 6074-84-6 H95353 Tantalum(V) ethoxide乙醇钽(V)

          化学属性

          Refractive index n20/D 1.487(lit.)
          Solubility Decomposes in water. Soluble in organic solvents
          TSCA Yes
          Mol. Formula C10H25O5Ta
          Mol. Weight 406.25
          Density 1.56
          Flash Point 87°F
          Appearance yellow liq.colorless to yellow liq.
          Stability moisture sensitive
          Boiling Point 155 °C at 0.01 mmHg
          Melting Point 21 °C

          *以上化合物性质及应用等信息仅供参考